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1 article(s) from Ma, Chengfu

Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

Wenting Wang,
Chengfu Ma,
Yuhang Chen,
Lei Zheng,
Huarong Liu and
Jiaru Chu

Beilstein J. Nanotechnol. 2019, 10, 1636–1647, doi:10.3762/bjnano.10.159

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Figure 1: (a) Schematic illustration of CR-AFM imaging on the flexible circuit sample. (b) An enlarged sectio...

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Figure 2: Subsurface imaging of the flexible circuit sample with a top layer thickness of 52 nm measured via ...

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Figure 3: Influence of the applied force on CR-AFM subsurface imaging of the flexible circuit sample with a 5...

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Figure 4: Influence of cantilever stiffness on CR-AFM subsurface imaging of the flexible circuit sample with ...

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Figure 5: The influence of cantilever oscillation eigenmode on CR-AFM subsurface imaging of a flexible circui...

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Figure 6: Influence of cover thickness on CR-AFM subsurface imaging of the circuit sample. (a–e) Frequency im...

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Figure 7: Influence of thickness and material properties of each layer on subsurface imaging of the circuit p...

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Figure 8: Optimization of CR-AFM subsurface imaging on a flexible circuit sample. (a,b) CR-AFM frequency imag...

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Figure 9: Subsurface imaging of defects in the buried circuit pattern using CR-AFM. (a) Schematic illustratio...

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Full Research Paper

Published 07 Aug 2019

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